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- 1837 - The townships of Proton, Luther, Melancthon and Amaranth become part of the County of Waterloo.
- 1838 - The townships of Waterloo, Wilmot, Woolwich, and some reserved lands west of Woolwich were to become part of the County of Waterloo.
- 1840 - Halton County is divided into the East Riding and the West Riding. The West Riding contains the townships of Garafraxa, Nichol, Woolwich, Guelp[h, Waterloo, Wilmot, Dumfries, Puslinch, Eramosa, and others.
- 1845 - West Riding of Halton County designated as County of Waterloo. Waterloo County included the townships of Arthur, Amaranth, Bentinck, Derby, Eramosa, Egremont, Guelph, Glenelg, Garrafraxa [sic], Holland, Luther, Mornington, Minto, Maryborough, Melancthon, Normanby, Nichol, Peel, Proton, Puslinch, Sydenham, Sullivan, Waterloo, Wilmot, Woolwich, and Wellesley. Erin was included for all purposes except Legislative Assembly representation, while Dumfries was included for purposes of Legislative Assembly representation.
- 1850 - Waterloo County includes the townships of Arthur, Amaranth, Bentinck, Derby, Eramosa, Egremont, Erin, Guelph, Glenelg, Garrafraxa [sic], Holland, Luther, Mornington, Minto, Maryborough, Melancthon, Normanby, Nichol, Peel, Proton, Puslinch, Sydenham, Sullivan, Waterloo, Wilmot, Woolwich, and Wellesley. Land included in Waterloo County included land to the north ot the Townships of Derby, Arran, and Saugeen and between Lake Huron and Georgian Bay, that had been known as the Indian Reserve.
- 1852 - Waterloo County alters in size. Townships within Waterloo County are North Dumfries, Waterloo, Wellesley, Wilmot, and Woolwich. The southern half of Dumfries went to Brant County.
- 1973 - Waterloo County is dissolved.
- 1912 - Berlin became a City.
- 1915 - Galt became a City.
- 1916 - Berlin changed its name to Kitchener.
- 1948 - Waterloo became a City.
- 1973 - Cambridge (city) is created by amalgamation of the towns of Galt, Preston, and Hespeler, and parts of Noth Dumfries Township and Waterloo Township. Waterloo remains a City, loses a part to Kitchener, and gains a part of Waterloo Township. Bridgeport lost its status and became part of the city of Kitchener, along with parts of Waterloo (city) and Waterloo (township). Parts of the townships of Beverly and North Dumfries and Ayr (village) amalgamate as North Dumfries Township.
- 1851 - Guelph became a Town. Annexed to Wellington District in 1852.
- 1857 - Galt became a Town.
- 1870 - Berlin became a Town.
- 1876 - Waterloo became a Town.
- 1900 - Preston became a Town.
- 1901 - Hespeler became a Town.
- 1922 - Elmira (village) becomes a Town.
- 1966 - New Hamburg became a Town.
- 1973 - New Hamburg lost its status and became part of Wilmot Township. Elmira and St. Jacobs lost their status and became part of Woolwich Township.
- North Dumfries
- Waterloo ( 1861 map of township)
- Wellesley Neighboring Counties
Perth | Oxford | Brant | Wellington
- Cemeteries of Waterloo County, Ontario full and partial transcriptions at Interment.net